rtp jet178

The JetFirst 200 system is a bench top RTP (Rapid Thermal Process) tool. apel888 rtp It is dedicated to the following applications or processes: RTA: Rapid Thermal Annealing for silicon or semiconductors compounds wafers (Nitrogen and Forming gas lines) N B : Forming gas = 5% H 2 in N 2; RTO: Rapid Thermal Oxidation (Oxygen line)